How can get the programm in to the CPU memory again?

Start CPU from scratch with an Eprom or an EEprom.

Yes you can store the Eprom, make sure the little window on the Eprom itself is covered and keep away from direct light, better get an EEprom or spare Eprom.

CPU can start without Eprom if Backup battery is ok, otherwise program is lost.
Never remove Eprom with power on.

To force the CPU to start from Eprom disconnect the battery and power up the CPU, then connect battery, cut the power again remove Eprom and power up.

CPU should now start from own memory.

If you have a spare CPU try it with that one first. 

I have followed your instructions like above but it works as long as there is a Eprom in the CPU..

I used an CPU 943 from the 115U series.

When I remove the module it doesn't work, so the programm is not in the CPU memory. How can i get the programm in to the CPU memory again?

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Split from Failed EPROM of s5 95U.